Analysis of grating inscribed micro-cantilever for high resolution AFM probe

N. Balajee; D. Roy Mahapatra; G. M. Hegde

doi:10.1117/12.2020330

22 June 2013 Analysis of grating inscribed micro-cantilever for high resolution AFM probe

N. Balajee, D. Roy Mahapatra, G. M. Hegde

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87690Z (2013) https://doi.org/10.1117/12.2020330
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

We present a mathematical modelling and analysis of reflection grating etched Si AFM cantilever deflections under different loading conditions. A simple analysis of the effect of grating structures on cantilever deflection is carried out with emphasis on optimizing the beam and gratings such that maximum amount of diffracted light remains within the detector area.

Citation Download Citation

N. Balajee, D. Roy Mahapatra, and G. M. Hegde "Analysis of grating inscribed micro-cantilever for high resolution AFM probe", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690Z (22 June 2013); https://doi.org/10.1117/12.2020330

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