A phase-stepped white light ellipsometer

Lionel R. Watkins

doi:10.1117/12.2018961

22 June 2013 A phase-stepped white light ellipsometer

Lionel R. Watkins

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 876918 (2013) https://doi.org/10.1117/12.2018961
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

We describe a spectroscopic ellipsometer which uses a variable waveplate to generate four phase-stepped intensities I (λ) of a white light source which are recorded by a small spectrometer. At each wavelength, the variable waveplate produces a constant, but unknown phase step α. We use Carré’s algorithm to determine the unknown phase step α at each wavelength and thence the ellipsometric angles ψ and Δ. We demonstrate our new instrument experimentally by measuring the retardation of an achromatic waveleplate and determining the thickness of silicon dioxide films on a silicon substrate.

Citation Download Citation

Lionel R. Watkins "A phase-stepped white light ellipsometer", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876918 (22 June 2013); https://doi.org/10.1117/12.2018961

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