Specular 3D shape measurement with a compact fringe reflection system

Lei Huang; Jun Xian Wong; Anand Asundi

doi:10.1117/12.2018927

22 June 2013 Specular 3D shape measurement with a compact fringe reflection system

Lei Huang, Jun Xian Wong, Anand Asundi

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691K (2013) https://doi.org/10.1117/12.2018927
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

The three-dimensional (3D) metrology for specular reflecting surfaces attracted much attention due to their various applications in optics, electronics, or semiconductor industry. Fringe reflection technique is an effective tool to measure the specular surface slopes (gradient information), and then reconstruct the surface shape from gradient. However, most of the fringe reflection systems are built up for middle size (~10,000 mm²) or larger size (~100,000 mm²) objects by using the off-the-shelf desktop displays. In order to measure samples with smaller size (~200 mm₂) with higher measuring resolution, a compact fringe reflection system is proposed. The performance of the compact specular 3D shape measurement system is demonstrated with experiments.

Citation Download Citation

Lei Huang, Jun Xian Wong, and Anand Asundi "Specular 3D shape measurement with a compact fringe reflection system", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691K (22 June 2013); https://doi.org/10.1117/12.2018927

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