Holographic nanointerferometer with digital magnification

S. A. Pulkin; V. Yu. Venediktov; V. Ivanov; V. I. Korotkov; N. I. Matveyeva; A. V. Panova; I. M. Pasechnik; A. A. Sevrygin; M. A. Solov’ev

doi:10.1117/12.2016853

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3 May 2013 Holographic nanointerferometer with digital magnification

S. A. Pulkin, V. Yu. Venediktov, V. Ivanov, V. I. Korotkov, N. I. Matveyeva, A. V. Panova, I. M. Pasechnik, A. A. Sevrygin, M. A. Solov’ev

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Proceedings Volume 8776, Holography: Advances and Modern Trends III; 87760C (2013) https://doi.org/10.1117/12.2016853
Event: SPIE Optics + Optoelectronics, 2013, Prague, Czech Republic

Abstract

The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.

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S. A. Pulkin, V. Yu. Venediktov, V. Ivanov, V. I. Korotkov, N. I. Matveyeva, A. V. Panova, I. M. Pasechnik, A. A. Sevrygin, and M. A. Solov’ev "Holographic nanointerferometer with digital magnification", Proc. SPIE 8776, Holography: Advances and Modern Trends III, 87760C (3 May 2013); https://doi.org/10.1117/12.2016853

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