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13 May 2013 Design rules for a compact and low-cost optical position sensing of MOEMS tilt mirrors based on a Gaussian-shaped light source
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A tilt mirror’s deflection angle tracking setup is examined from a theoretical point of view. The proposed setup is based on a simple optical approach and easily scalable. Thus, the principle is especially of interest for small and fast oscillating MEMS/MOEMS based tilt mirrors. An experimentally established optical scheme is used as a starting point for accurate and fast mirror angle-position detection. This approach uses an additional layer, positioned under the MOEMS mirror's backside, consisting of a light source in the center and two photodetectors positioned symmetrical around the center. The mirror’s back surface is illuminated by the light source and the intensity change due to mirror tilting is tracked via the photodiodes. The challenge of this method is to get a linear relation between the measured intensity and the current mirror tilt angle even for larger angles. State-of-the-art MOEMS mirrors achieve angles up to ±30°, which exceeds the linear angle approximations. The use of an LED, small laser diode or VCSEL as a lightsource is appropriate due to their small size and inexpensive price. Those light sources typically emit light with a Gaussian intensity distribution. This makes an analytical prediction of the expected detector signal quite complicated. In this publication an analytical simulation model is developed to evaluate the influence of the main parameters for this optical mirror tilt-sensor design. An easy and fast to calculate value directly linked to the mirror’s tilt-angle is the “relative differential intensity” (RDI = (I1 − I2) / (I1 + I2)). Evaluation of its slope and nonlinear error highlights dependencies between the identified parameters for best SNR and linearity. Also the energy amount covering the detector area is taken into account. Design optimizing rules are proposed and discussed based on theoretical considerations.
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Marcus Baumgart and Andreas Tortschanoff "Design rules for a compact and low-cost optical position sensing of MOEMS tilt mirrors based on a Gaussian-shaped light source", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890A (13 May 2013);

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