Paper
20 May 2013 Thermal monitoring of the diamond deposition process using regenerated FBG
Nélia J. Alberto, Raul Simões, Valmir de Oliveira, Hypolito J. Kalinowski, Victor F. Neto, Rogério N. Nogueira
Author Affiliations +
Proceedings Volume 8794, Fifth European Workshop on Optical Fibre Sensors; 879408 (2013) https://doi.org/10.1117/12.2026011
Event: Fifth European Workshop on Optical Fibre Sensors, 2013, Krakow, Poland
Abstract
In this work, Bragg gratings were used to monitor, in real time, the temperature during the diamond deposition process obtained by hot filament chemical vapor deposition (HFCVD). Due to the instability of uniform fiber Bragg gratings (FBGs) to high temperatures, regenerated fiber Bragg gratings (RFBGs) were utilized. The results reveal that the diamond deposition process occurs at about 832 ºC (in the experimental conditions used in this case). The work also suggests that RFBGs are suitable devices to monitor processes which, as in the diamond deposition, the temperature is a critical parameter, and where other traditional methods have a little feasibility due to the own experimental setup or samples type under study.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nélia J. Alberto, Raul Simões, Valmir de Oliveira, Hypolito J. Kalinowski, Victor F. Neto, and Rogério N. Nogueira "Thermal monitoring of the diamond deposition process using regenerated FBG", Proc. SPIE 8794, Fifth European Workshop on Optical Fibre Sensors, 879408 (20 May 2013); https://doi.org/10.1117/12.2026011
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Cited by 3 scholarly publications.
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KEYWORDS
Diamond

Deposition processes

Fiber Bragg gratings

Reflection

Chemical vapor deposition

Coating

Optical fibers

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