Paper
26 September 2013 Piezoelectricity of ZnO nano-rods array prepared by hydrothermal method
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Abstract
In this works, the piezoelectric devices of ZnO nano-rods were fabricated for piezoelectric sensor. The ZnO nano-rods were grown by hydrothermal synthesis through two-dimensional nano-patterns using a laser interference lithography. ZnO nano-rods were preferred orientation with c-axis and wurtzite structure. It was found that the electricity of nano-rod piezoelectric device was 8x10-7 Wh under the load of 0.8kgf. The piezoelectric behaviors are attributed to the direct compression of ZnO nano-rods by an external force. Therefore, the piezoelectric devices of ZnO nano-rods fabricated by hydrothermal methods were applicable to the pressure sensors.
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Seon Hoon Kim, Tae Un Kim, Hyun Chul Ki, Doo Gun Kim, Ju Hyun Choi, and Jin Hyeok Kim "Piezoelectricity of ZnO nano-rods array prepared by hydrothermal method", Proc. SPIE 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X, 88161I (26 September 2013); https://doi.org/10.1117/12.2024972
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KEYWORDS
Zinc oxide

Nanorods

Nanolithography

Lithography

Sensors

Nanostructures

Photonics

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