Paper
30 September 2013 Comparison of SiC mirror approaches
Keith Carrigan, Michael Riso, Shayna Khatri, Christopher Douglas
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Abstract
Silicon Carbide (SiC) mirrors hold many advantages over traditional optical materials and are increasingly common in optical systems. The wide range of optical applications necessitates different approaches to the manufacturing and finishing of SiC mirrors. Three key advancements have led to this differentiation: 1) manufacturing of CVD clad SiC mirrors in near cost and schedule parity with Zerodur, 2) super-polish of amorphous Silicon claddings, 3) low-roughness polishing results of bare reaction-bonded SiC aspheres. Three approaches which utilize these advancements will be discussed, each with its own strengths and weaknesses for specific applications. The relative schedules and performance of these approaches will also be compared, with Zerodur used as a reference.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Keith Carrigan, Michael Riso, Shayna Khatri, and Christopher Douglas "Comparison of SiC mirror approaches", Proc. SPIE 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems, 88370E (30 September 2013); https://doi.org/10.1117/12.2023424
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Cited by 1 scholarly publication.
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KEYWORDS
Silicon carbide

Cladding

Mirrors

Zerodur

Polishing

Surface finishing

Chemical vapor deposition

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