Fabrication of SiC aspheric mirrors with low mid-spatial error

Flemming Tinker; Kai Xin

doi:10.1117/12.2028014

30 September 2013 Fabrication of SiC aspheric mirrors with low mid-spatial error

Flemming Tinker, Kai Xin

Proceedings Volume 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems; 88370M (2013) https://doi.org/10.1117/12.2028014
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Recent experience with finishing off-axis parabolas and other conic surfaces is demonstrated by some examples that illustrate surface accuracy – not only in terms of traditional metrics, but also in terms of specified ranges of spatial frequency. Particular attention is given to the topic of interferometric metrology, and the extent to which we can effectively characterize mid-spatial frequency errors. The presence of mid-spatial errors can appear even more dominant in hard ceramics like SiC as compared with glass – reasons for this are suggested. This paper will discuss how controlled force grinding, robotic polishing, and surface smoothing can be employed to minimize and mitigate mid-spatial errors in fast silicon carbide aspheric mirrors. Recent experience and results are presented on two SiC mirrors finished by Aperture Optical Sciences Inc.

Citation Download Citation

Flemming Tinker and Kai Xin "Fabrication of SiC aspheric mirrors with low mid-spatial error", Proc. SPIE 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems, 88370M (30 September 2013); https://doi.org/10.1117/12.2028014

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