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7 September 2013The fast measurement of a mild asphere by the vibration-modulated sub-aperture stitching interferometer
Sub-aperture testing methods are widely used in optical shops to test surface deformations of large diameter, high
numerical aperture, or aspherical lens surfaces. We are proposing a novel 4 axis vibration modulated interferometer for
subaperture testing. This interferometer takes advantage of the rotationally symmetric property of the optical lens and
measures the lens surface against its symmetry axis rotationally. By adapting a synchronous random phase modulation
measurement, interferometric data is acquired on the fly when the lens is being rotated. The vibration modulated
interference phase is then calculated and stitched into a complete lens surface map by least squared fitting. This method
has advantages over the prior methods in that it acquires the interferogram in a much shorter acquisition time, even with
lower requirements on the optics and mechanical hardware. The stitch error is then significantly decreased by increasing
both the lateral resolution of sub-aperture and the reduced position uncertainty of the stitched sub-aperture phase maps.
A measurement on a mild asphere is demonstrated to prove the feasibility of the proposed interferometer.
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Hung-Sheng Chang, Po-Chih Lin, Chao-Wen Liang, Yi-Chun Chen, Wei-Yao Hsu, Zong-Ru Yu, "The fast measurement of a mild asphere by the vibration-modulated sub-aperture stitching interferometer," Proc. SPIE 8838, Optical Manufacturing and Testing X, 88380C (7 September 2013); https://doi.org/10.1117/12.2023558