The diffractive optics calibrator: design and construction

Wenrui Cai; Ping Zhou; Chunyu Zhao; James H. Burge

doi:10.1117/12.2023524

6 September 2013 The diffractive optics calibrator: design and construction

Wenrui Cai, Ping Zhou, Chunyu Zhao, James H. Burge

Proceedings Volume 8839, Dimensional Optical Metrology and Inspection for Practical Applications II; 883907 (2013) https://doi.org/10.1117/12.2023524
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

We present a new device, the Diffractive Optics Calibrator (DOC), for measuring duty-cycle and etching depth for computer generated holograms (CGH). The system scans the CGH with a collimated laser beam, and collects the far field diffraction pattern with a CCD array. The relative intensities of the various orders of diffraction are used to fit the phase shift from etching and the duty cycle of the binary pattern. The system is capable of measuring variations that cause 1 nm PV phase errors in the wavefront created by the CGH. The measurements will be used primarily for quality control CGHs, but the data can also be used to provide a lookup table for corrections that allow calibration of the lithography errors. Such calibration may be necessary for us to achieve our goal of measuring freeform aspheric surfaces with 1 nm RMS accuracy.

Citation Download Citation

Wenrui Cai, Ping Zhou, Chunyu Zhao, and James H. Burge "The diffractive optics calibrator: design and construction", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 883907 (6 September 2013); https://doi.org/10.1117/12.2023524

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available