Uni-axial inner profile measurement

Toshitaka Wakayama; Toru Yoshizawa

doi:10.1117/12.2023473

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6 September 2013 Uni-axial inner profile measurement

Toshitaka Wakayama, Toru Yoshizawa

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Proceedings Volume 8839, Dimensional Optical Metrology and Inspection for Practical Applications II; 88390L (2013) https://doi.org/10.1117/12.2023473
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

This paper demonstrated a uni-axial inner profile measurement based on the shape from focus. The key device is a conical mirror and a variable focus lens. The shape of light beam is transformed from a point beam to a disk-like beam after passing through the variable focus lens and the conical mirror. The focus position of the disk-like beam can be controlled by electric current given to the variable focus lens. The beam is formed like a ring on the inner surface of the cylindrical sample. A CCD camera captures the ring as intensity distribution after the ring beam turn back to the way. The magnitudes of the intensity distribution are changed along focused positions of the ring beam. That is to say, the intensity distribution is described a Gaussian profile in the function of the electric current value. As this result, the radius distribution of the inner surface profile can be determined from the property of electric current of the variable focus lens. We have shown some experimental results as a coaxial inner profile measurement.

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Toshitaka Wakayama and Toru Yoshizawa "Uni-axial inner profile measurement", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 88390L (6 September 2013); https://doi.org/10.1117/12.2023473

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