Two-dimensional sub-5-nm hard x-ray focusing with MZP

Markus Osterhoff; Matthias Bartels; Florian Döring; Christian Eberl; Thomas Hoinkes; Sarah Hoffmann; Tobias Liese; Volker Radisch; Arno Rauschenbeutel; Anna-Lena Robisch; Aike Ruhlandt; Felix Schlenkrich; Tim Salditt; Hans-Ulrich Krebs

doi:10.1117/12.2025389

27 September 2013 Two-dimensional sub-5-nm hard x-ray focusing with MZP

Markus Osterhoff, Matthias Bartels, Florian Döring, Christian Eberl, Thomas Hoinkes, Sarah Hoffmann, Tobias Liese, Volker Radisch, Arno Rauschenbeutel, Anna-Lena Robisch, Aike Ruhlandt, Felix Schlenkrich, Tim Salditt, Hans-Ulrich Krebs

Author Affiliations +

Proceedings Volume 8848, Advances in X-Ray/EUV Optics and Components VIII; 884802 (2013) https://doi.org/10.1117/12.2025389
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

We present experiments carried out using a combined hard x-ray focusing set-up preserving the benefits of a large-aperture Kirckpatrick-Baez (KB) mirror system and a small focal length multilayer zone plane (MZP). The high gain KB mirrors produce a pre-focus of 400 nm × 200 nm; in their defocus, two MZP lenses of diameter of 1.6 μm and 3.7 μm have been placed, with focal lengths of 50 μm and 250 μm respectively. The lenses have been produced using pulsed laser deposition (PLD) and focused ion beam (FIB). Forward simulations including error models based on measured deviations, auto-correlation analysis and three-plane phase reconstruction support two-dimensional focus sizes of 4.3 nm × 4.7 nm (7:9 keV, W/Si)¹ and 4.3 nm ×5.9 nm (13:8 keV, W/ZrO₂), respectively.

Citation Download Citation

Markus Osterhoff, Matthias Bartels, Florian Döring, Christian Eberl, Thomas Hoinkes, Sarah Hoffmann, Tobias Liese, Volker Radisch, Arno Rauschenbeutel, Anna-Lena Robisch, Aike Ruhlandt, Felix Schlenkrich, Tim Salditt, and Hans-Ulrich Krebs "Two-dimensional sub-5-nm hard x-ray focusing with MZP", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 884802 (27 September 2013); https://doi.org/10.1117/12.2025389

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