Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy

Yoshinori Takei; Takehiro Kume; Hiroto Motoyama; Kentaro Hiraguri; Hirokazu Hashizume; Hidekazu Mimura

doi:10.1117/12.2023940

27 September 2013 Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy

Yoshinori Takei, Takehiro Kume, Hiroto Motoyama, Kentaro Hiraguri, Hirokazu Hashizume, Hidekazu Mimura

Author Affiliations +

Proceedings Volume 8848, Advances in X-Ray/EUV Optics and Components VIII; 88480C (2013) https://doi.org/10.1117/12.2023940
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Ellipsoidal mirrors are one of the most promising types of X-ray mirror, because the mirror can focus X-rays to nanometer size with a large aperture and no chromatic aberration. However, so far ideal ellipsoidal mirrors cannot be realized by any manufacturing methods. One of the reasons is there is no fabrication method to process their inside surface with a diameter of several millimeters with nanometer-level accuracy. We propose and develop a manufacturing process of the ellipsoidal mirror. First, a master which has the reversed shape is prepared using grinding, polishing and Elastic Emission Machining (EEM). EEM can finish the surface shape to within 2nm (RMS). Then, the ellipsoidal mirror is produced by replicating the surface using an electroforming deposition method. By conducting the process without any stress at room temperature, replicating the surface roughness and shape with nanometer order accuracy is possible. In this paper, we report the current status of manufacturing of the ellipsoidal mirror.

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Yoshinori Takei, Takehiro Kume, Hiroto Motoyama, Kentaro Hiraguri, Hirokazu Hashizume, and Hidekazu Mimura "Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480C (27 September 2013); https://doi.org/10.1117/12.2023940

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