X-ray mirror metrology using SCOTS/deflectometry

Run Huang; Peng Su; James H. Burge; Mourad Idir

doi:10.1117/12.2024500

27 September 2013 X-ray mirror metrology using SCOTS/deflectometry

Run Huang, Peng Su, James H. Burge, Mourad Idir

Proceedings Volume 8848, Advances in X-Ray/EUV Optics and Components VIII; 88480G (2013) https://doi.org/10.1117/12.2024500
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a ‘virtual null’ test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.

Citation Download Citation

Run Huang, Peng Su, James H. Burge, and Mourad Idir "X-ray mirror metrology using SCOTS/deflectometry", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480G (27 September 2013); https://doi.org/10.1117/12.2024500

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available