Error compensation for the calibration of mechanical mirror benders

Josep Nicolas; Juan Campos

doi:10.1117/12.2024510

27 September 2013 Error compensation for the calibration of mechanical mirror benders

Josep Nicolas, Juan Campos

Proceedings Volume 8848, Advances in X-Ray/EUV Optics and Components VIII; 88480K (2013) https://doi.org/10.1117/12.2024510
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

The use of linear methods to obtain both the error surface and the instrument error from redundant-independent datasets has been proposed to improve the accuracy of angle measuring scanning devices such as the long trace profilometer (LTP) or the nanometer optical measuring machine (NOM). In this work we propose to extend the method to measurements obtained during the calibration of mechanical benders. The proposed method allows determining an error-free measure of the slope error, the curvature and the cubic component of the mirror, as well as the instrument error. The description of the method, simulations and practical works are presented.

Citation Download Citation

Josep Nicolas and Juan Campos "Error compensation for the calibration of mechanical mirror benders", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480K (27 September 2013); https://doi.org/10.1117/12.2024510

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