On-chip sensing with high-Q amorphous silicon microdisk resonators

T. Lipka; J. Amthor; J. Müller

doi:10.1117/12.2019502

20 May 2013 On-chip sensing with high-Q amorphous silicon microdisk resonators

T. Lipka, J. Amthor, J. Müller

Proceedings Volume 8879, Nano-Bio Sensing, Imaging, and Spectroscopy; 88790A (2013) https://doi.org/10.1117/12.2019502
Event: Nano-Bio Sensing, Imaging and Spectroscopy, 2013, Jeju, Korea, Republic of

Abstract

In this paper we present a low-loss hydrogenated amorphous silicon microdisk resonator which is employed for evanescent field refractive index sensing. The resonances of the whispering gallery modes have extinction ratios of <25dB and Q-factors up to 15000 when covered with aqueous solutions. The sensitivity of the microdisk sensor was experimentally determined to be 460nm/RIU for the qTM-mode with different concentrations of NaCl dispersed in deionized water. From the measurements the resonators intrinsic limit of detection was calculated to be LOD=3.3x10^-4 and the minimum detectable amount of NaCl diluted in DI-water was determined to be 0.0375%. The early results prove that photonic microdisk resonators that are fabricated with low-loss hydrogenated amorphous silicon material can be applied in a variety of different areas for label-free lab-on-chip sensing, including chemical, medical and bio-sensing applications.

Citation Download Citation

T. Lipka, J. Amthor, and J. Müller "On-chip sensing with high-Q amorphous silicon microdisk resonators", Proc. SPIE 8879, Nano-Bio Sensing, Imaging, and Spectroscopy, 88790A (20 May 2013); https://doi.org/10.1117/12.2019502

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