Performance of an automatic algorithm for quantifying critical dimensions in actinic aerial images

Doug Uzzel; Mark Ma; Shad E. Hedges; Saghir Munir

doi:10.1117/12.2027913

9 September 2013 Performance of an automatic algorithm for quantifying critical dimensions in actinic aerial images

Doug Uzzel, Mark Ma, Shad E. Hedges, Saghir Munir

Author Affiliations +

Proceedings Volume 8880, Photomask Technology 2013; 88800B (2013) https://doi.org/10.1117/12.2027913
Event: SPIE Photomask Technology, 2013, Monterey, California, United States

Abstract

This article presents results from an algorithm that can automatically quantify critical dimensions in images from Mask inspection tools with a very high level of accuracy. Using such an algorithm the inspection systems can be run with much tighter settings, resulting in more false defect detections that can then be filtered using the algorithm described here. Such a technique could potentially make the inspection system suitable for inspecting photo-masks beyond its practical limitation.

Citation Download Citation

Doug Uzzel, Mark Ma, Shad E. Hedges, and Saghir Munir "Performance of an automatic algorithm for quantifying critical dimensions in actinic aerial images", Proc. SPIE 8880, Photomask Technology 2013, 88800B (9 September 2013); https://doi.org/10.1117/12.2027913

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