Model-based etch profile simulation of PSM films

Michael Grimbergen; Madhavi Chandrachood; Jeffrey Tran; Becky Leung; Keven Yu; Amitabh Sabharwal; Ajay Kumar

doi:10.1117/12.2029006

1 October 2013 Model-based etch profile simulation of PSM films

Michael Grimbergen, Madhavi Chandrachood, Jeffrey Tran, Becky Leung, Keven Yu, Amitabh Sabharwal, Ajay Kumar

Author Affiliations +

Proceedings Volume 8880, Photomask Technology 2013; 88800X (2013) https://doi.org/10.1117/12.2029006
Event: SPIE Photomask Technology, 2013, Monterey, California, United States

Abstract

For advanced binary and PSM mask etch, final profile control is critically important for achieving desired mask specifications. As an aid to attain profile control, an etch profile simulation method has been developed. The method starts with an initial photoresist profile and incorporates etch rate and directionality information to predict the final etch profile. In this paper, simulated results are compared to measured etch profiles for PSM substrates. The results highlight the importance and implications of incoming resist profile and etch selectivity on final profile.

Citation Download Citation

Michael Grimbergen, Madhavi Chandrachood, Jeffrey Tran, Becky Leung, Keven Yu, Amitabh Sabharwal, and Ajay Kumar "Model-based etch profile simulation of PSM films", Proc. SPIE 8880, Photomask Technology 2013, 88800X (1 October 2013); https://doi.org/10.1117/12.2029006

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