Finite-element based electromagnetic field simulations: benchmark results for isolated structures

Sven Burger; Lin Zschiedrich; Jan Pomplun; Frank Schmidt

doi:10.1117/12.2026213

9 October 2013 Finite-element based electromagnetic field simulations: benchmark results for isolated structures

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Author Affiliations +

Proceedings Volume 8880, Photomask Technology 2013; 88801Z (2013) https://doi.org/10.1117/12.2026213
Event: SPIE Photomask Technology, 2013, Monterey, California, United States

Abstract

We use a finite-element method to obtain highly converged results for a nano-optical light scattering setup with a non-periodic geometry.

Citation Download Citation

Sven Burger, Lin Zschiedrich, Jan Pomplun, and Frank Schmidt "Finite-element based electromagnetic field simulations: benchmark results for isolated structures", Proc. SPIE 8880, Photomask Technology 2013, 88801Z (9 October 2013); https://doi.org/10.1117/12.2026213

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE