Paper
10 June 2013 Materials micro-processing using femtosecond lasers
R. Dabu, M. Zamfirescu, I. Anghel, F. Jipa
Author Affiliations +
Proceedings Volume 8882, ROMOPTO 2012: Tenth Conference on Optics: Micro- to Nanophotonics III; 888207 (2013) https://doi.org/10.1117/12.2032337
Event: ROMOPTO International Conference on Micro- to Nano-Photonics III, 2012, Bucharest, Romania
Abstract
Nonlinear optical phenomena which dominate the interaction of tightly focused femtosecond laser beams with materials are discussed. Different femtosecond laser based techniques for material processing such as laser ablation, two-photon photo-polymerization, and material surface nano-structuring are described. For the computer controlled micro-processing of materials, near-infrared Ti:sapphire femtosecond lasers, with nano-Joule/micro-Joule pulse energy, were coupled with direct laser writing workstations. Laser fabricated micro-nanostructures and their applications are presented.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Dabu, M. Zamfirescu, I. Anghel, and F. Jipa "Materials micro-processing using femtosecond lasers", Proc. SPIE 8882, ROMOPTO 2012: Tenth Conference on Optics: Micro- to Nanophotonics III, 888207 (10 June 2013); https://doi.org/10.1117/12.2032337
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Femtosecond phenomena

Photoresist materials

Laser ablation

Laser processing

Microscopes

Titanium dioxide

Absorption

Back to Top