Non-contact metrology of aspheric surfaces based on MWLI technology

G. Berger; J. Petter

doi:10.1117/12.2029238

15 October 2013 Non-contact metrology of aspheric surfaces based on MWLI technology

G. Berger, J. Petter

Proceedings Volume 8884, Optifab 2013; 88840V (2013) https://doi.org/10.1117/12.2029238
Event: SPIE Optifab, 2013, Rochester, New York, United States

Abstract

A non-contact optical scanning metrology solution measuring aspheric surfaces is presented, which is based on multi wavelength interferometry (MWLI). The technology yields high density 3D data in short measurement times (including set up time) and provides high, reproducible form measurement accuracy. It measures any asphere without restrictions in terms of spherical departures. In addition, measurement of a large variety of special optics is enabled, such as annular lenses, segmented optics, optics with diffractive steps, ground optics, optics made of opaque and transparent materials, and small and thin optics (e.g. smart phone lenses). The measurement instrument can be used under production conditions.

Citation Download Citation

G. Berger and J. Petter "Non-contact metrology of aspheric surfaces based on MWLI technology", Proc. SPIE 8884, Optifab 2013, 88840V (15 October 2013); https://doi.org/10.1117/12.2029238

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