Looking for simple engineering solutions in DFM patents

Artur Balasinski

doi:10.1117/12.2028831

1 October 2013 Looking for simple engineering solutions in DFM patents

Artur Balasinski

Proceedings Volume 8886, 29th European Mask and Lithography Conference; 88860M (2013) https://doi.org/10.1117/12.2028831
Event: 29th European Mask and Lithography Conference, 2013, Dresden, Germany

Abstract

Progress in IC technologies is usually based on costly improvements of process equipment. An alternative path is to look into opportunities based on the engineering disclosures, which can have a lot of potential in the Design-for- Manufacturing domain. This paper discusses six examples of such disclosures, filed in the 2010-2012 timeframe.

Citation Download Citation

Artur Balasinski "Looking for simple engineering solutions in DFM patents", Proc. SPIE 8886, 29th European Mask and Lithography Conference, 88860M (1 October 2013); https://doi.org/10.1117/12.2028831

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