A prototype femtosecond laser system for MEMS fabrication

K. Garasz; M. Kocik; M. Tański; R. Barbucha; J. Mizeraczyk; M. Nejbauer; C. Radzewicz

doi:10.1117/12.2030552

25 July 2013 A prototype femtosecond laser system for MEMS fabrication

K. Garasz, M. Kocik, M. Tański, R. Barbucha, J. Mizeraczyk, M. Nejbauer, C. Radzewicz

Proceedings Volume 8902, Electron Technology Conference 2013; 89021S (2013) https://doi.org/10.1117/12.2030552
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

In this article, the concept of a prototype femtosecond laser micromachining system and a femtosecond solid-state Yb:KYW laser is presented. Ultrashort laser pulses have many advantages over the long pulses in laser micromachining, due to their unique ability to interact with different materials without transferring heat to them. This allows very precise and pure laser-processing, clean cuts and sharp edges. A femtosecond laser micromachining device presented in this article is equipped with high-precision galvo scanner, quality optical elements and automatic process supporting tools, resulting in the maximum use of the femtosecond laser potential for precise micromachining and MEMS fabrication.

Citation Download Citation

K. Garasz, M. Kocik, M. Tański, R. Barbucha, J. Mizeraczyk, M. Nejbauer, and C. Radzewicz "A prototype femtosecond laser system for MEMS fabrication", Proc. SPIE 8902, Electron Technology Conference 2013, 89021S (25 July 2013); https://doi.org/10.1117/12.2030552

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