Low-resistance contact layers on the basis of polymer composites containing silver nanoparticles dedicated to semiconductor devices

Joanna Kalbarczyk; Anna Młożniak; Konrad Krzyżak; Marian Teodorczyk

doi:10.1117/12.2031179

25 July 2013 Low-resistance contact layers on the basis of polymer composites containing silver nanoparticles dedicated to semiconductor devices

Joanna Kalbarczyk, Anna Młożniak, Konrad Krzyżak, Marian Teodorczyk

Author Affiliations +

Proceedings Volume 8902, Electron Technology Conference 2013; 89022K (2013) https://doi.org/10.1117/12.2031179
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

Manufacturing of semiconductor devices consists of many equally significant stages. Every improperly-performed detail may cause abnormal functioning of the device which is very undesirable. Electrical contact manufacturing guarantees the connection between the "inner world" containing phenomena on the molecular level of the device and the "outer world" including connections to other objects and enabling consumer usability. In the following thesis two kinds of pastes containing silver nanoparticles in polymer matrix have been used to make electrical contacts. Performed layers have been compared with sputtering-method made contacts.

Citation Download Citation

Joanna Kalbarczyk, Anna Młożniak, Konrad Krzyżak, and Marian Teodorczyk "Low-resistance contact layers on the basis of polymer composites containing silver nanoparticles dedicated to semiconductor devices", Proc. SPIE 8902, Electron Technology Conference 2013, 89022K (25 July 2013); https://doi.org/10.1117/12.2031179

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available