Paper
11 October 2013 Fully etched grating coupler with low back reflection
Author Affiliations +
Proceedings Volume 8915, Photonics North 2013; 89150U (2013) https://doi.org/10.1117/12.2037955
Event: Photonics North 2013, 2013, Ottawa, Canada
Abstract
A fully-etched grating coupler with improved back re ection and bandwidth is demonstrated in this paper. It can also be made in compact patterns with much smaller footprints than conventional, fully-etched grating couplers with long adiabatic tapers. Sub-wavelength gratings were employed to form the e ective index areas between the major gratings. Our grating has a measured 3-dB bandwidth of 64.37 nm with a back re ection of -14 dB.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yun Wang, Wei Shi, Xu Wang, Jonas Flueckiger, Han Yun, Nicolas A. F. Jaeger, and Lukas Chrostowski "Fully etched grating coupler with low back reflection", Proc. SPIE 8915, Photonics North 2013, 89150U (11 October 2013); https://doi.org/10.1117/12.2037955
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Cited by 12 scholarly publications.
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KEYWORDS
Waveguides

Oxides

Silicon

Optical design

Photonic integrated circuits

Device simulation

Refractive index

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