Radius measurement using a parallel two-step spatial carrier phase-shifting common-path interferometer

Bengong Hao; Ming Diao; Zhi Zhong; Mingguang Shan; Yabin Zhang

doi:10.1117/12.2035755

10 October 2013 Radius measurement using a parallel two-step spatial carrier phase-shifting common-path interferometer

Bengong Hao, Ming Diao, Zhi Zhong, Mingguang Shan, Yabin Zhang

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891623 (2013) https://doi.org/10.1117/12.2035755
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

A curvature radius (CR) measurement method using a parallel two-step spatial carrier phase-shifting common-path interferometer is presented. This interferometer is built on a 4f optical system with two windows in the input plane and a ronchi grating outside the fourier plane. A test lens is placed in front of one of the two windows. The phase of the test lens is retrieved from the two phase shifted interferograms recorded using this interferometer and then the profile can be obtained. The CR of the test lens is thus directly derived from the profile according to their geometrical relations. The theoretical model and experimental setup are established to illustrate this method and the measurement processes. Experiments are constructed to verify the effectiveness of the CR measurement using this interferometer. The results prove that this interferometer is an effective approach for the CR measurement with inherent simplicity, high robustness and accuracy.

Citation Download Citation

Bengong Hao, Ming Diao, Zhi Zhong, Mingguang Shan, and Yabin Zhang "Radius measurement using a parallel two-step spatial carrier phase-shifting common-path interferometer", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891623 (10 October 2013); https://doi.org/10.1117/12.2035755

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