A high-accuracy signal processing algorithm for frequency scanned interferometry

Shuai Zhang; Liangen Yang; Xuanze Wang; Zhongsheng Zhai; Wenchao Liu

doi:10.1117/12.2035708

10 October 2013 A high-accuracy signal processing algorithm for frequency scanned interferometry

Shuai Zhang, Liangen Yang, Xuanze Wang, Zhongsheng Zhai, Wenchao Liu

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891628 (2013) https://doi.org/10.1117/12.2035708
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

A high-accuracy signal processing algorithm was designed for the absolute distance measurement system performed with frequency scanned interferometry. The system uses frequency-modulated laser as light source and consists of two interferometers: the reference interferometer is used to compensate the errors and the measurement interferometer is used to measure the displacement. The reference interferometer and the measurement interferometer are used to measure synchronously. The principle of the measuring system and the current modulation circuit were presented. The smoothing convolution was used for processing the signals. The optical path difference of the reference interferometer has been calibrated, so the absolute distance can be measured by acquiring the phase information extracted from interference signals produced while scanning the laser frequency. Finally, measurement results of absolute distances ranging from 0.1m to 0.5m were presented. The experimental results demonstrated that the proposed algorithm had major computing advantages.

Citation Download Citation

Shuai Zhang, Liangen Yang, Xuanze Wang, Zhongsheng Zhai, and Wenchao Liu "A high-accuracy signal processing algorithm for frequency scanned interferometry", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891628 (10 October 2013); https://doi.org/10.1117/12.2035708

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