Digital optimeter based on linear CCD

Qing Hu; Yuanling Xu

doi:10.1117/12.2035786

10 October 2013 Digital optimeter based on linear CCD

Qing Hu, Yuanling Xu

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891640 (2013) https://doi.org/10.1117/12.2035786
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

In this paper, the development of a new type of digital optimeter based on linear CCD is introduced and discussed. It is based on traditional autocollimation optical system and optical lever motion, with linear CCD as measuring element. A light band generated by slit is captured by linear CCD after passing through an autocollimation optical system. A piece of mirror placed in the optical path of this system is controlled by displacement of a measuring slide in order to adjust the light band imaging position. The displacement of light band is detected by CCD and is then displayed in digital format. Such a design successfully eliminates the existing issues of signal quality and signal overspeed in digital optimeters using grating as the measuring element. The final product based on this technique has been released, offering a resolution of 0.1μm and 0.02μm.

Citation Download Citation

Qing Hu and Yuanling Xu "Digital optimeter based on linear CCD", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891640 (10 October 2013); https://doi.org/10.1117/12.2035786

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