Buried picolitre fluidic channels in single-crystal diamond

Michelle A. Strack; Barbara A. Fairchild; Andrew D. C. Alves; Philipp Senn; Brant C. Gibson; Steven Prawer; Andrew D. Greentree

doi:10.1117/12.2035099

20 December 2013 Buried picolitre fluidic channels in single-crystal diamond

Michelle A. Strack, Barbara A. Fairchild, Andrew D. C. Alves, Philipp Senn, Brant C. Gibson, Steven Prawer, Andrew D. Greentree

Author Affiliations +

Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 89232X (2013) https://doi.org/10.1117/12.2035099
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia

Abstract

We report the generation of sub-surface nanouidic channels from single crystal diamond. To make the channels, we used a combination of ion-beam induced damage and annealing to create a buried, etchable graphitic layer in the diamond. Either laser or focussed ion-beam milling was then used to connect to that layer, and subsequent electro-chemical etching used to remove the graphitic material. The channels had dimensions 100-200 nm thick, 100 μm wide and 300 μm long, which have a total volume around 3 pL; and were around 3 μm below the diamond surface.

Citation Download Citation

Michelle A. Strack, Barbara A. Fairchild, Andrew D. C. Alves, Philipp Senn, Brant C. Gibson, Steven Prawer, and Andrew D. Greentree "Buried picolitre fluidic channels in single-crystal diamond", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89232X (20 December 2013); https://doi.org/10.1117/12.2035099

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