Nanocrystallic thin films statistical structural analysis by the automatic image processing

Maciek Wielgus; Zofia Sunderland; Daniel Koguciuk; Krzysztof Patorski; Grzegorz Słowik

doi:10.1117/12.2033770

7 December 2013 Nanocrystallic thin films statistical structural analysis by the automatic image processing

Maciek Wielgus, Zofia Sunderland, Daniel Koguciuk, Krzysztof Patorski, Grzegorz Słowik

Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 89234S (2013) https://doi.org/10.1117/12.2033770
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia

Abstract

We demonstrate the powerful new algorithm for automatic analysis of the electron diffraction patterns in the microscopic images. The method can be outlined as follows: (1) filtration of the image in the Fourier domain (2) normalization with the bidimensional Hilbert transform, so-called vortex transform (3) local diffraction pattern frequency estimation by the finite difference operator (4) morphological filtration for the elements segmentation (5) construction of the sample features statistics. With sufficient quality maintained and vastly reduced time necessary for the computations, the method is superior to previously considered wavelet-based approach for the automatic analysis of large data sets.

Citation Download Citation

Maciek Wielgus, Zofia Sunderland, Daniel Koguciuk, Krzysztof Patorski, and Grzegorz Słowik "Nanocrystallic thin films statistical structural analysis by the automatic image processing", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89234S (7 December 2013); https://doi.org/10.1117/12.2033770

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