Influence of laser parameters on quality of microholes and process efficiency

A. Feuer; C. Kunz; M. Kraus; V. Onuseit; R. Weber; T. Graf; D. Ingildeev; F. Hermanutz

doi:10.1117/12.2037674

6 March 2014 Influence of laser parameters on quality of microholes and process efficiency

A. Feuer, C. Kunz, M. Kraus, V. Onuseit, R. Weber, T. Graf, D. Ingildeev, F. Hermanutz

Proceedings Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; 89670H (2014) https://doi.org/10.1117/12.2037674
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

To enable the direct-spinning process of super-micro fibres (< 0.5 dtex) suitable for novel medical, hygienical and technical products microhole arrays with diameters down to 25 μm in very high quality are required. Using ultrashort pulses together with a helical drilling optics microholes with high accuracy were manufactured in metals of a thickness in the range of 0.3 mm. However, the required process time for a single microhole ranges up to several ten seconds. Simple energy balance considerations show that higher averaged powers - either achieved with larger pulse energies or an increased repetition rate - considerable reduce the process time. In this case plasma formation and heat accumulation show an increased formation of melt and recast. Thus, the objective is to increase the productivity while maintaining consistent quality of the microholes. With this aim, the influence of pulse energy and repetition rate on the borehole geometry, processing quality and process efficiency was investigated for helical drilling. In the present research work a TruMicro 5250 laser source (t_p = 8 ps, λ=515 nm, f_R=800 kHz) was used. To determine the process time of the microhole the transmitted laser radiation was recorded. A systematic evaluation of the process quality and process time dependent on pulse energy and repetition rate will be presented in this contribution. First laser manufactured spinning nozzles with microhole diameters down to 25 μm processed in 0.24 mm thick AuPt alloy were used to fabricate unique super-micro fibres with yarn counts down to 0.2 dtex.

Citation Download Citation

A. Feuer, C. Kunz, M. Kraus, V. Onuseit, R. Weber, T. Graf, D. Ingildeev, and F. Hermanutz "Influence of laser parameters on quality of microholes and process efficiency", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670H (6 March 2014); https://doi.org/10.1117/12.2037674

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available