Scanning Tomographic Acoustic Microscopy

G Wade; A Meyyappan

doi:10.1117/12.944538

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12 July 1988 Scanning Tomographic Acoustic Microscopy

G Wade, A Meyyappan

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Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944538
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

The technology for "seeing" with sound has an important and interesting history. Some of nature's creatures have been using sound waves for many millenia to image otherwise unobservable objects. The human species, lacking this natural ability, have overcome this deficiency by developing several different ultrasonic imaging techniques. acoustic microscopy is one such technique, which produces high resolution images of detailed structure of small objects in a non-destructive fashion. Two types of acoustic microscopes have evolved for industrial exploitation. They are the scanning laser acoustic microscope (SLAM) and the scanning acoustic microscope (SAM). In this paper, we review the principles of SLAM and describe how we use elements of SLAM to realize the scanning tomographic acoustic microscope (STAM). We describe the data acquisition process and the image reconstruction procedure. We also describe techniques to obtain projection data from different angles of wave incidence enabling us to reconstruct different planes of a complex specimen tomo-graphically. Our experimental results show that STAM is capable of producing high-quality high-resolution subsurface images.

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G Wade and A Meyyappan "Scanning Tomographic Acoustic Microscopy", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944538

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