Thermal And Photothermal Imaging On A Sub 100 Nanometer Scale

C C Williams; H K Wickramasinghe

doi:10.1117/12.944530

12 July 1988 Thermal And Photothermal Imaging On A Sub 100 Nanometer Scale

C C Williams, H K Wickramasinghe

Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944530
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

A review is made of progress in high resolution near field thermal imaging. The Scanning Thermal Profiler, initially demonstrated as a surface profiler, has profiled aluminum films with sub 100 nanometer resolution. More recently, the thermal sensor has been used to map current induced heating of a surface with comparable resolution. Finally, photothermal imaging of laser heated surfaces has been demonstrated, with image structure well below 100 nanometers.

Citation Download Citation

C C Williams and H K Wickramasinghe "Thermal And Photothermal Imaging On A Sub 100 Nanometer Scale", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944530

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