Gas-mediated charged particle beam processing of nanostructured materials

C. J. Lobo; A. A. Martin; C. Elbadawi; J. Bishop; I. Aharonovich; M. Toth

doi:10.1117/12.2042021

6 March 2014 Gas-mediated charged particle beam processing of nanostructured materials

C. J. Lobo, A. A. Martin, C. Elbadawi, J. Bishop, I. Aharonovich, M. Toth

Proceedings Volume 8970, Laser 3D Manufacturing; 89700O (2014) https://doi.org/10.1117/12.2042021
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

Gas mediated processing under a charged particle (electron or ion) beam enables direct-write, high resolution surface functionalization, chemical dry etching and chemical vapor deposition of a wide range of materials including catalytic metals, optoelectronic grade semiconductors and oxides. Here we highlight three recent developments of particular interest to the optical materials and nanofabrication communities: fabrication of self-supporting, three dimensional, fluorescent diamond nanostructures, electron beam induced deposition (EBID) of high purity materials via activated chemisorption, and post-growth purification of nanocrystalline EBID-grown platinum suitable for catalysis applications.

Citation Download Citation

C. J. Lobo, A. A. Martin, C. Elbadawi, J. Bishop, I. Aharonovich, and M. Toth "Gas-mediated charged particle beam processing of nanostructured materials", Proc. SPIE 8970, Laser 3D Manufacturing, 89700O (6 March 2014); https://doi.org/10.1117/12.2042021

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