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7 March 2014 Studies on the dynamics of vacuum encapsulated 2D MEMS scanners by laser Doppler vibrometry
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2D MEMS scanners are used for e.g. Laser projection purposes or Lidar applications. Electrostatically driven resonant torsional oscillations of both axes of the scanners lead to Lissajous trajectories for Laser beams reflected from the micro mirror. Wafer level vacuum encapsulation with tilt glass capping ensures high angular amplitudes at low driving voltages additionally preventing environmental impacts. Applying Laser Doppler Vibrometry, the effect of residual gas friction, squeezed film damping and internal friction on 2D MEMS scanners is analyzed by measuring the Q-values associated with the torsional oscillations. Vibrometry is also used to analyze the oscillatory motion of the micro mirror and the gimbal of the scanners. Excited modes of the scanner structures are identified giving rise to coupling effects influencing the scanning performance of the 2D MEMS mirrors.
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Joachim Janes and Ulrich Hofmann "Studies on the dynamics of vacuum encapsulated 2D MEMS scanners by laser Doppler vibrometry", Proc. SPIE 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII, 89750H (7 March 2014);


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