Micro-scanning mirrors for high-power laser applications in laser surgery

Thilo Sandner; Simon Kimme; Thomas Grasshoff; Ulrich Todt; Alexander Graf; Cristian Tulea; Achim Lenenbach; Harald Schenk

doi:10.1117/12.2042671

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8 March 2014 Micro-scanning mirrors for high-power laser applications in laser surgery

Thilo Sandner, Simon Kimme, Thomas Grasshoff, Ulrich Todt, Alexander Graf, Cristian Tulea, Achim Lenenbach, Harald Schenk

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Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 897705 (2014) https://doi.org/10.1117/12.2042671
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser-surgical instrument for neurosurgery to cut skull tissue. An electrostatic driven 2D-raster scanning mirror with 5x7.1mm aperture is used for dynamic steering of a ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micro mirror with 6 mm x 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W average laser power.

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Thilo Sandner, Simon Kimme, Thomas Grasshoff, Ulrich Todt, Alexander Graf, Cristian Tulea, Achim Lenenbach, and Harald Schenk "Micro-scanning mirrors for high-power laser applications in laser surgery", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897705 (8 March 2014); https://doi.org/10.1117/12.2042671

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