Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

S. Gu-Stoppel; J. Janes; H. J. Quenzer; U. Hofmann; W. Benecke

doi:10.1117/12.2036565

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7 March 2014 Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

S. Gu-Stoppel, J. Janes, H. J. Quenzer, U. Hofmann, W. Benecke

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Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 897706 (2014) https://doi.org/10.1117/12.2036565
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

This paper presents designs and fabrication process of two single-axis PZT micromirrors with 1 mm diameter and 1.4 mm × 4 mm apertures, whose frequencies are 60 kHz and 17 kHz, respectively. These micromirrors achieve large optical scan angles of about 40° driven by 10 V rectangular pulses and show high Q-factors of more than 1000. The investigation on the long-term stability of a PZT driven micromirror has detected more than 100 Billion cycles. The combined results of experimental diagnostics and FEM analyses give rise to new designs iteratively leading to a larger deflection and appropriate frequencies, which are currently fabricated.

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S. Gu-Stoppel, J. Janes, H. J. Quenzer, U. Hofmann, and W. Benecke "Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897706 (7 March 2014); https://doi.org/10.1117/12.2036565

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