MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

Jussi H. Mäkynen; Mikko Tuohiniemi; Antti Näsilä; Rami Mannila; Jarkko E. Antila

doi:10.1117/12.2036272

7 March 2014 MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 μm to 9.5 μm wavelength range

Jussi H. Mäkynen, Mikko Tuohiniemi, Antti Näsilä, Rami Mannila, Jarkko E. Antila

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770U (2014) https://doi.org/10.1117/12.2036272
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 μm to 9.5 μm. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 μm to 9.5 μm by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature.

Citation Download Citation

Jussi H. Mäkynen, Mikko Tuohiniemi, Antti Näsilä, Rami Mannila, and Jarkko E. Antila "MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 μm to 9.5 μm wavelength range", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U (7 March 2014); https://doi.org/10.1117/12.2036272

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