Low-loss titanium-dioxide strip waveguides by atomic layer deposition

M. Roussey; M. Häyrinen; A. Säynätjoki; V. Gandhi; L. Karvonen; P. Stenberg; M. Kuittinen; S. Honkanen

doi:10.1117/12.2038912

7 March 2014 Low-loss titanium-dioxide strip waveguides by atomic layer deposition

M. Roussey, M. Häyrinen, A. Säynätjoki, V. Gandhi, L. Karvonen, P. Stenberg, M. Kuittinen, S. Honkanen

Proceedings Volume 8982, Optical Components and Materials XI; 89820E (2014) https://doi.org/10.1117/12.2038912
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

In this paper we describe an approach to reduce the propagation loss in titanium dioxide strip waveguides. We achieved to reduce losses down to 2.4 dB/cm in 1 μm-wide waveguide at λ=1550 nm.

Citation Download Citation

M. Roussey, M. Häyrinen, A. Säynätjoki, V. Gandhi, L. Karvonen, P. Stenberg, M. Kuittinen, and S. Honkanen "Low-loss titanium-dioxide strip waveguides by atomic layer deposition", Proc. SPIE 8982, Optical Components and Materials XI, 89820E (7 March 2014); https://doi.org/10.1117/12.2038912

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