Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water

Yi Zou; Harish Subbaraman; Swapnajit Chakravarty; Xiaochuan Xu; Amir Hosseini; Wei-Cheng Lai; Ray T. Chen

doi:10.1117/12.2040412

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8 March 2014 Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water

Yi Zou, Harish Subbaraman, Swapnajit Chakravarty, Xiaochuan Xu, Amir Hosseini, Wei-Cheng Lai, Ray T. Chen

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Proceedings Volume 8990, Silicon Photonics IX; 89900X (2014) https://doi.org/10.1117/12.2040412
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

A chip integrated infrared spectrometer for in situ sensing and spectroscopic identification of VOCs in water probing large absorption cross sections of VOCs in the mid-infrared is desired. Preliminary strip and slot waveguide devices fabricated in silicon-on-sapphire for operation at 3.4μm wavelength experimentally demonstrated propagation loss of 2.1dB/cm for strip waveguides and 11dB/cm for slot waveguide. VOC are extracted from water using PDMS for solid phase micro-extraction and enables absorbance measurements independent from the strong absorbance of water. Absorbance of xylene as a typical VOC is determined on chip from the difference in transmitted intensity in the presence and absence of xylene.

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Yi Zou, Harish Subbaraman, Swapnajit Chakravarty, Xiaochuan Xu, Amir Hosseini, Wei-Cheng Lai, and Ray T. Chen "Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water", Proc. SPIE 8990, Silicon Photonics IX, 89900X (8 March 2014); https://doi.org/10.1117/12.2040412

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