Research of Temporal Speckle Pattern Interferometry for in-plane measurement

Guangyu Li; Zhan Gao; Yan Deng

doi:10.1117/12.2034061

19 December 2013 Research of Temporal Speckle Pattern Interferometry for in-plane measurement

Guangyu Li, Zhan Gao, Yan Deng

Proceedings Volume 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 904603 (2013) https://doi.org/10.1117/12.2034061
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

In this paper, a ridge algorithm which is based on wavelet analysis is adopted in the measurement of in-plane displacement. To measure in-plane displacement by electronic speckle pattern interferometry (ESPI), a series of speckle patterns are captured with the help of a CCD camera which is known as temporal speckle pattern interferometry (TSPI) technique and TSPI technique has better correlation and a larger measuring range compared with ESPI technique. To retrieve the phase fluctuation caused by the displacement of specimen, three types of complex wavelets are selected in the wavelet analysis to compare with the traditional Fourier analysis.

Citation Download Citation

Guangyu Li, Zhan Gao, and Yan Deng "Research of Temporal Speckle Pattern Interferometry for in-plane measurement", Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 904603 (19 December 2013); https://doi.org/10.1117/12.2034061

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