High precision double-interferometry displacement measurement by waveform transforming based on FFT

Yunzhi Wang; Fang Xie; Sen Ma

doi:10.1117/12.2038063

19 December 2013 High precision double-interferometry displacement measurement by waveform transforming based on FFT

Yunzhi Wang, Fang Xie, Sen Ma

Proceedings Volume 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 904604 (2013) https://doi.org/10.1117/12.2038063
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

The paper researches on a high precision displacement measurement system mixing double-wavelength interferometry and single-wavelength interferometry by waveform transforming based on Fast Fourier Transform (FFT) technology. The signal of double-wavelength interferometry is used for determining the amplitude of the measurand which makes the measurement range be as large as half a synthetic-wavelength, while that of single-wavelength interferometry is for measuring the value of the measurand precisely which endows the measurement resolution to be as high as less than 1nm, for the amount of the interference fringes of the signal of single-wavelength interferometry during the shifting range of the peak of the signal of double-wavelength interferometry demonstrates the value of the measurand. However, as the signal of double-wavelength interferometry is cosine amplitude modulated, the peak area of it is flatten and the peak position is difficult to be determined, which will influence the measurement precision directly. In order to address the peak position of the double-wavelength interferometric signal accurately, we transform using FFT technology the cosine amplitude modulated signal of double-wavelength interferometry into a triangle-wave amplitude modulated signal to make the peak position prominent. It is very easy to determine the peak position accurately and the amount of the interference fringes of the signal of single-wavelength interferometry during the shifting range of the peak will also be determined precisely. High precision displacement measurement with large range and high resolution could be realized.

Citation Download Citation

Yunzhi Wang, Fang Xie, and Sen Ma "High precision double-interferometry displacement measurement by waveform transforming based on FFT", Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 904604 (19 December 2013); https://doi.org/10.1117/12.2038063

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Interferometry

Modulation

Signal detection

Signal processing

Precision measurement

Mirrors

Fiber Bragg gratings

Show All Keywords

Keywords/Phrases

Search In:

Publication Years