Novel three dimensional (3D) CD-SEM profile measurements

Wataru Ito; Benjamin Bunday; Sumito Harada; Aaron Cordes; Tsutomu Murakawa; Abraham Arceo; Makoto Yoshikawa; Toshihiko Hara; Takehito Arai; Soichi Shida; Masayuki Yamagata; Jun Matsumoto; Takayuki Nakamura

doi:10.1117/12.2047374

2 April 2014 Novel three dimensional (3D) CD-SEM profile measurements

Wataru Ito, Benjamin Bunday, Sumito Harada, Aaron Cordes, Tsutomu Murakawa, Abraham Arceo, Makoto Yoshikawa, Toshihiko Hara, Takehito Arai, Soichi Shida, Masayuki Yamagata, Jun Matsumoto, Takayuki Nakamura

Author Affiliations +

Proceedings Volume 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII; 90500D (2014) https://doi.org/10.1117/12.2047374
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

A new SEM technology is becoming available that allows image-based 3D profile metrology of nanoscale features. Using patented multi-channel detector technology, this system can acquire information of surface concave and convex features, and sidewall angle (SWA) and height of profiles, quickly and non-destructively for nanoscale structures such as fin field-effect transistors (FinFETs), using electron beam technology with its well-known long probe lifetime, stability and small probe size. Here we evaluate this new technology and demonstrate its applicability to contemporary advanced structures such as FinFETs, including not only CD, but also profile, SWA, top corner rounding (TCR) and bottom corner rounding (BCR).

Citation Download Citation

Wataru Ito, Benjamin Bunday, Sumito Harada, Aaron Cordes, Tsutomu Murakawa, Abraham Arceo, Makoto Yoshikawa, Toshihiko Hara, Takehito Arai, Soichi Shida, Masayuki Yamagata, Jun Matsumoto, and Takayuki Nakamura "Novel three dimensional (3D) CD-SEM profile measurements", Proc. SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 90500D (2 April 2014); https://doi.org/10.1117/12.2047374

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available