Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection

Bosheng Zhang; Daniel E. Adams; Matthew D. Seaberg; Dennis F. Gardner; Elisabeth R. Shanblatt; Henry Kapteyn; Margaret Murnane

doi:10.1117/12.2046526

2 April 2014 Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection

Bosheng Zhang, Daniel E. Adams, Matthew D. Seaberg, Dennis F. Gardner, Elisabeth R. Shanblatt, Henry Kapteyn, Margaret Murnane

Author Affiliations +

Proceedings Volume 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII; 90501D (2014) https://doi.org/10.1117/12.2046526
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Coherent diffraction imaging (CDI) has matured into a versatile phase-contrast microscopy technique capable of producing diffraction limited images without the need for high precision focusing elements. CDI has been most appropriately applied in the EUV/X-ray region of the spectrum where imaging optics are both difficult to produce and inefficient. By satisfying basic geometric constraints (such as Nyquist sampling of scattered intensities) diffraction imaging techniques essentially replace any imaging elements with sophisticated computer algorithms. We demonstrate the utility of our CDI-based, phase-contrast EUV microscope by quantitatively imaging objects in both transmission and reflection. Patterned feature depth is obtained in transmission using keyhole coherent diffraction imaging (KCDI) and feature height is quantitatively extracted in the first general, table-top reflection mode CDI microscope.

Citation Download Citation

Bosheng Zhang, Daniel E. Adams, Matthew D. Seaberg, Dennis F. Gardner, Elisabeth R. Shanblatt, Henry Kapteyn, and Margaret Murnane "Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection", Proc. SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 90501D (2 April 2014); https://doi.org/10.1117/12.2046526

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