Inhomogeneity of PAGs in resist film studied by molecular-dynamics simulations for EUV lithography

Minoru Toriumi; Toshiro Itani

doi:10.1117/12.2045872

27 March 2014 Inhomogeneity of PAGs in resist film studied by molecular-dynamics simulations for EUV lithography

Minoru Toriumi, Toshiro Itani

Proceedings Volume 9051, Advances in Patterning Materials and Processes XXXI; 90511C (2014) https://doi.org/10.1117/12.2045872
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

EUV resist materials are requested simultaneously to improve the resolution, line-edge roughness (LER), and sensitivity (RLS). In a resist film inhomogeneous structures in nanometer region may have large effects on directly the resolution and LER and indirectly on sensitivity. Inhomogeneity of PAGs in a hybrid resist for EUV lithography was investigated using molecular dynamics simulations. The hybrid resist film showed the inhomogeneous positions and motions of PAG cations and anions. Free volumes in resist matrix influence the motions of PAGs. Molecular structure such as bulky phenyl groups of a PAG cation localize the positions and reduce the motion of a cation. Chemical properties such as ionic interactions and lone-pair interaction also play an important role to determine the inhomogeneity of PAGs. Fluorine interaction enables active motions of PAG anions.

Citation Download Citation

Minoru Toriumi and Toshiro Itani "Inhomogeneity of PAGs in resist film studied by molecular-dynamics simulations for EUV lithography", Proc. SPIE 9051, Advances in Patterning Materials and Processes XXXI, 90511C (27 March 2014); https://doi.org/10.1117/12.2045872

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available