A new type of microphone using flexoelectric barium strontium titnate

Seol ryung Kwon; Wenbin Huang; Shujun Zhang; Fuh-Gwo Yuan; Xiaoning Jiang

doi:10.1117/12.2045072

8 March 2014 A new type of microphone using flexoelectric barium strontium titnate

Seol ryung Kwon, Wenbin Huang, Shujun Zhang, Fuh-Gwo Yuan, Xiaoning Jiang

Proceedings Volume 9062, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014; 90620Y (2014) https://doi.org/10.1117/12.2045072
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2014, San Diego, California, United States

Abstract

A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba_0.65Sr_0.35TiO₃ or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications.

Citation Download Citation

Seol ryung Kwon, Wenbin Huang, Shujun Zhang, Fuh-Gwo Yuan, and Xiaoning Jiang "A new type of microphone using flexoelectric barium strontium titnate", Proc. SPIE 9062, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014, 90620Y (8 March 2014); https://doi.org/10.1117/12.2045072

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