MWIR superlattice detectors integrated with substrate side-illuminated plasmonic coupler

M. Zamiri; E. Plis; J. O. Kim; S. C. Lee; A. Neumann; S. Myers; E. P. Smith; A. M. Itsuno; J. G. A. Wehner; S. M. Johnson; S. R. J. Brueck; S. Krishna

doi:10.1117/12.2050785

24 June 2014 MWIR superlattice detectors integrated with substrate side-illuminated plasmonic coupler

M. Zamiri, E. Plis, J. O. Kim, S. C. Lee, A. Neumann, S. Myers, E. P. Smith, A. M. Itsuno, J. G. A. Wehner, S. M. Johnson, S. R. J. Brueck, S. Krishna

Author Affiliations +

Proceedings Volume 9070, Infrared Technology and Applications XL; 90700Y (2014) https://doi.org/10.1117/12.2050785
Event: SPIE Defense + Security, 2014, Baltimore, MD, United States

Abstract

Detectivity of mid-wave infrared (MWIR) detectors based on InAs/GaSb type II strained layer superlattices (T2SLs) can be significantly enhanced at select wavelengths by integrating the detector with a back-side illuminated plasmonic coupler. The application of a simple metal-T2SL structure directly on the GaSb substrate can result in radiation losses into the substrate due to the low refractive index of T2SL layer. However, insertion of a higher refractive index material, such as germanium (Ge), into the metal-SLS structure can confine the surface plasmon waveguide (SPW) modes to the surface. In this work, metal (Au)-Ge-T2SL structures are designed with an approximately 100 nm thick Ge layer. The T2SL layer utilized a p-i-n detector design with 8 monolayers (MLs) InAs/8 MLs GaSb. A plasmonic coupler was then realized inside the 300 μm circular apertures of these single element detectors by the formation of a corrugated metal (Au) surface. The T2SL single element detector integrated with an optimized plasmonic coupler design increased the quantum efficiency (QE) by a factor of three at an operating temperature of 77 K and 3 to 5 μm illumination wavelength, compared to a reference detector structure, and each structure exhibited the same level of dark current.

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M. Zamiri, E. Plis, J. O. Kim, S. C. Lee, A. Neumann, S. Myers, E. P. Smith, A. M. Itsuno, J. G. A. Wehner, S. M. Johnson, S. R. J. Brueck, and S. Krishna "MWIR superlattice detectors integrated with substrate side-illuminated plasmonic coupler", Proc. SPIE 9070, Infrared Technology and Applications XL, 90700Y (24 June 2014); https://doi.org/10.1117/12.2050785

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