Design of a nano-machined pyroelectric detector for low thermal conductance

Md A. Muztoba; Noureddine Melikechi; Mukti M. Rana

doi:10.1117/12.2053466

24 June 2014 Design of a nano-machined pyroelectric detector for low thermal conductance

Md A. Muztoba, Noureddine Melikechi, Mukti M. Rana

Proceedings Volume 9070, Infrared Technology and Applications XL; 90701V (2014) https://doi.org/10.1117/12.2053466
Event: SPIE Defense + Security, 2014, Baltimore, MD, United States

Abstract

Pyroelectric detector is a class of thermal detector in which the change in temperature causes the change in the spontaneous polarization in the sensing material. In this work, we report the design of uncooled pyroelectric detectors which utilized a nanometer sized truss to support the suspended detector. The design and performance of pyroelectric detectors have been conducted by simulating the structure with Intellisuite™ utilizing Finite Element Method (FEM). The simulated detectors had a spider web-like structure with each of the strut of spider web had a width of 100 nm. Ca modified lead titanate (PCT) was employed as the thermometer because of its high pyroelectric figure of merit. The pyroelectric detectors utilized Ni_0.8Cr_0.2 absorber, PCT sensing layer, Ti electrodes, Al₂O₃ structural layer to obtain low thermal conductance between the detector and Si substrate. Three different types of pyroelectric detectors were designed and analyzed. The first design had linear electrode and simple spider web support. The value of the thermal conductance of this detector was found to be 3.98×10^-8 W/K. The second design had a longer thermal path than the first one and had a thermal conductivity of 2.41×10^-8 W/K. The design was optimized for the best result by modifying the shape, dimension and thickness of various layers namely absorber, electrodes, sensing layer and struts. The thermal conductance of the third design was found to be as low as 4.57×10^-9 W/K which is significantly lower than previously reported values. The highest calculated detectivity and reponsivity values were 1.15 × 10¹⁰ cm Hz^1/2/W and 4.9 × 10⁷ V/W respectively.

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Md A. Muztoba, Noureddine Melikechi, and Mukti M. Rana "Design of a nano-machined pyroelectric detector for low thermal conductance", Proc. SPIE 9070, Infrared Technology and Applications XL, 90701V (24 June 2014); https://doi.org/10.1117/12.2053466

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KEYWORDS

Sensors

Pyroelectric detectors

Electrodes

Thermal effects

Infrared detectors

Thermal sensing

Infrared radiation

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