A fabrication and characterictics of microbolometer detectors using VOx/ZnO/VOx multilayer thin film processing

Myung-Soo Han; Dae Hyeon Kim; Hang Ju Ko; Jae Chul Shin; Hyo Jin Kim; Do Gun Kim

doi:10.1117/12.2049513

24 June 2014 A fabrication and characterictics of microbolometer detectors using VOx/ZnO/VOx multilayer thin film processing

Myung-Soo Han, Dae Hyeon Kim, Hang Ju Ko, Jae Chul Shin, Hyo Jin Kim, Do Gun Kim

Author Affiliations +

Proceedings Volume 9070, Infrared Technology and Applications XL; 90701X (2014) https://doi.org/10.1117/12.2049513
Event: SPIE Defense + Security, 2014, Baltimore, MD, United States

Abstract

In this work, a novel fabrication method for VOx-ZnO multilayers with mixed phase of the VO₂ and V₂O₃ through the diffusion of oxygen by annealing at low temperature is presented. A stable sandwich structure of a VOx/ZnO/VOx multilayer was deposited at room temperature, through the oxygen gas flow rate, by RF sputtering system, and the mixed phase was formed through oxygen diffusion by annealing at O₂ atmosphere. The results show that the single phase like multilayer formed by this process has a high TCR of more than -2.5%/K and low resistance of about 100 kohm at room temperature. XRD results for the as-deposited VOx/ZnO/VOx multilayer.

Citation Download Citation

Myung-Soo Han, Dae Hyeon Kim, Hang Ju Ko, Jae Chul Shin, Hyo Jin Kim, and Do Gun Kim "A fabrication and characterictics of microbolometer detectors using VOx/ZnO/VOx multilayer thin film processing", Proc. SPIE 9070, Infrared Technology and Applications XL, 90701X (24 June 2014); https://doi.org/10.1117/12.2049513

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available